Inventor
TSUKAMOTO TETSUSHI
JP5 patents
Patents
5 patentsUS7264908B2Sep 4, 2007
Photo mask blank and photo mask
SHINETSU CHEMICAL CO17 citations82
US7195846B2Mar 27, 2007
Methods of manufacturing photomask blank and photomask
SHINETSU CHEMICAL CO13 citations82
US7037625B2May 2, 2006
Phase shift mask blank and method of manufacture
SHINETSU CHEMICAL CO2 citations62
US6928837B2Aug 16, 2005
Silica glass substrates and their selection
SHINETSU CHEMICAL CO6 citations61
US6727027B2Apr 27, 2004
Photomask blank and photomask
SHINETSU CHEMICAL CO1 citations50