Inventor
TETREAULT THOMAS G
US4 patents
⚠️ This page may combine multiple inventors who share the name “TETREAULT THOMAS G”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TEL EPION INC
3 patentsUS7410890B2Aug 12, 2008
Formation of doped regions and/or ultra-shallow junctions in semiconductor materials by gas-cluster ion irradiation
TEL EPION INC28 citations91
US7564024B2Jul 21, 2009
Methods and apparatus for assigning a beam intensity profile to a gas cluster ion beam used to process workpieces
TEL EPION INC11 citations81
US7883999B2Feb 8, 2011
Method for increasing the penetration depth of material infusion in a substrate using a gas cluster ion beam
TEL EPION INC4 citations61