Inventor

SKINNER WESLEY J

US7 patents

⚠️ This page may combine multiple inventors who share the name “SKINNER WESLEY J”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

EPION CORP

4 patents

US6812147B2Nov 2, 2004

GCIB processing to improve interconnection vias and improved interconnection via

EPION CORP54 citations95

US6613240B2Sep 2, 2003

Method and apparatus for smoothing thin conductive films by gas cluster ion beam

EPION CORP64 citations95

US6331227B1Dec 18, 2001

Enhanced etching/smoothing of dielectric surfaces

EPION CORP77 citations94

US6624081B2Sep 23, 2003

Enhanced etching/smoothing of dielectric surfaces

EPION CORP36 citations90

TEL EPION INC

3 patents

US7259036B2Aug 21, 2007

Methods of forming doped and un-doped strained semiconductor materials and semiconductor films by gas-cluster-ion-beam irradiation and materials and film products

TEL EPION INC131 citations97

US7410890B2Aug 12, 2008

Formation of doped regions and/or ultra-shallow junctions in semiconductor materials by gas-cluster ion irradiation

TEL EPION INC28 citations91

US7396745B2Jul 8, 2008

Formation of ultra-shallow junctions by gas-cluster ion irradiation

TEL EPION INC12 citations83