Inventor
VAN DE VEN BASTIAAN LAMBERTUS
NL8 patents
Patents
8 patentsUS6753945B2Jun 22, 2004
Transfer method for a mask or substrate, storage box, apparatus adapted for use in such method, and device manufacturing method including such a transfer method
ASML NETHERLANDS BV25 citations90
US7236233B2Jun 26, 2007
Assembly of a reticle holder and a reticle
ASML NETHERLANDS BV14 citations82
US7153612B2Dec 26, 2006
Mask handling method, and mask and device or apparatus comprising a gripper therefor, device manufacturing method and device manufactured thereby
ASML NETHERLANDS BV15 citations78
US7123344B2Oct 17, 2006
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV9 citations71
US7466397B2Dec 16, 2008
Safety mechanism for a lithographic patterning device
ASML NETHERLANDS BV3 citations61
US7423733B2Sep 9, 2008
Lithographic apparatus, device manufacturing method, and device manufactured thereby with docking system for positioning a patterning device
ASML NETHERLANDS BV4 citations61
US7084961B2Aug 1, 2006
Safety mechanism for a lithographic patterning device
ASML NETHERLANDS BV6 citations61
US7053980B2May 30, 2006
Lithographic alignment system
ASML NETHERLANDS BV0 citations40