Inventor
HEERENS GERT-JAN
NL17 patents
⚠️ This page may combine multiple inventors who share the name “HEERENS GERT-JAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
16 patentsUS6753945B2Jun 22, 2004
Transfer method for a mask or substrate, storage box, apparatus adapted for use in such method, and device manufacturing method including such a transfer method
ASML NETHERLANDS BV25 citations90
US7236233B2Jun 26, 2007
Assembly of a reticle holder and a reticle
ASML NETHERLANDS BV14 citations82
US7522263B2Apr 21, 2009
Lithographic apparatus and method
ASML NETHERLANDS BV14 citations78
US7306680B2Dec 11, 2007
Method of cleaning by removing particles from surfaces, a cleaning apparatus and a lithographic projection apparatus
ASML NETHERLANDS BV9 citations73
US6856376B2Feb 15, 2005
Lithographic apparatus, apparatus cleaning method, device manufacturing method and device manufactured thereby
ASML NETHERLANDS BV7 citations71
US7466397B2Dec 16, 2008
Safety mechanism for a lithographic patterning device
ASML NETHERLANDS BV3 citations61
US7423733B2Sep 9, 2008
Lithographic apparatus, device manufacturing method, and device manufactured thereby with docking system for positioning a patterning device
ASML NETHERLANDS BV4 citations61
US7202934B2Apr 10, 2007
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV4 citations61
US7084961B2Aug 1, 2006
Safety mechanism for a lithographic patterning device
ASML NETHERLANDS BV6 citations61
US7361911B2Apr 22, 2008
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV2 citations59
US7151589B2Dec 19, 2006
Lithographic apparatus and patterning device transport
ASML NETHERLANDS BV3 citations59
US7781237B2Aug 24, 2010
Alignment marker and lithographic apparatus and device manufacturing method using the same
ASML NETHERLANDS BV2 citations54
US7839489B2Nov 23, 2010
Assembly of a reticle holder and a reticle
ASML NETHERLANDS BV1 citations51
US7119346B2Oct 10, 2006
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations50
US7248340B2Jul 24, 2007
Lithographic apparatus and patterning device transport
ASML NETHERLANDS BV0 citations48
US7053980B2May 30, 2006
Lithographic alignment system
ASML NETHERLANDS BV0 citations40