P

Inventor

ISHIMOTO JUNKI

JP5 patents
⚠️ This page may combine multiple inventors who share the name “ISHIMOTO JUNKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

EBARA CORP

3 patents
US7645181B2Jan 12, 2010

Polishing state monitoring apparatus and polishing apparatus

EBARA CORP13 citations92
US7438627B2Oct 21, 2008

Polishing state monitoring method

EBARA CORP17 citations92
US8342907B2Jan 1, 2013

Polishing state monitoring method

EBARA CORP3 citations62

SHIMADZU CORP

2 patents
US7252575B2Aug 7, 2007

Polishing state monitoring apparatus and polishing apparatus and method

SHIMADZU CORP44 citations95
US6999168B2Feb 14, 2006

Spectrophotometer

SHIMADZU CORP0 citations48