Inventor
SHINYA KAZUNARI
JP7 patents
⚠️ This page may combine multiple inventors who share the name “SHINYA KAZUNARI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SHIMADZU CORP
4 patentsUS7252575B2Aug 7, 2007
Polishing state monitoring apparatus and polishing apparatus and method
SHIMADZU CORP44 citations95
US7012699B2Mar 14, 2006
Method of and apparatus for measuring thickness of thin film or thin layer
SHIMADZU CORP9 citations73
US5442574AAug 15, 1995
Method and apparatus for determining a base line of a measurement
SHIMADZU CORP7 citations71
US7002693B2Feb 21, 2006
Thickness measurement method and apparatus
SHIMADZU CORP2 citations60