Inventor
SUDA HIDEKI
JP9 patents
⚠️ This page may combine multiple inventors who share the name “SUDA HIDEKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HOYA CORP
7 patentsUS5942356AAug 24, 1999
Phase shift mask and phase shift mask blank
HOYA CORP56 citations94
US7674563B2Mar 9, 2010
Pattern forming method and phase shift mask manufacturing method
HOYA CORP10 citations82
US6242138B1Jun 5, 2001
Phase shift mask and phase shift mask blank
HOYA CORP8 citations72
US6153341ANov 28, 2000
Phase shift mask and phase shift mask blank
HOYA CORP11 citations72
US6475681B2Nov 5, 2002
Phase shift mask and phase shift mask blank
HOYA CORP3 citations61
US7846617B2Dec 7, 2010
Pattern forming method and phase shift mask manufacturing method
HOYA CORP4 citations60
US7678509B2Mar 16, 2010
Method of producing phase shift masks
HOYA CORP6 citations60