Inventor
BATZER RACHEL E
US9 patents
Patents
9 patentsUS9828672B2Nov 28, 2017
Minimizing radical recombination using ALD silicon oxide surface coating with intermittent restoration plasma
LAM RES CORP25 citations93
US11920239B2Mar 5, 2024
Minimizing radical recombination using ALD silicon oxide surface coating with intermittent restoration plasma
LAM RES CORP3 citations74
US12000047B2Jun 4, 2024
Integrated showerhead with thermal control for delivering radical and precursor gas to a downstream chamber to enable remote plasma film deposition
LAM RES CORP1 citations71
USD948658SApr 12, 2022
High density hole pattern dual plenum hole showerhead assembly
LAM RES CORP5 citations67
US12331402B2Jun 17, 2025
Integrated showerhead with thermal control for delivering radical and precursor gas to a downstream chamber to enable remote plasma film deposition
LAM RES CORP0 citations61
USD1099688SOct 28, 2025
Threaded nozzle insert
LAM RES CORP0 citations60
USD1114751SFeb 24, 2026
Hub with gas deflectors
LAM RES CORP1 citations58
US12362153B2Jul 15, 2025
Pedestal setup using camera wafer
LAM RES CORP0 citations50
US12593641B2Mar 31, 2026
Apparatuses for cleaning a multi-station semiconductor processing chamber
LAM RES CORP0 citations46