Inventor
BREILING PATRICK GIRARD
US6 patents
Patents
6 patentsUS9758868B1Sep 12, 2017
Plasma suppression behind a showerhead through the use of increased pressure
LAM RES CORP24 citations93
US11608559B2Mar 21, 2023
Integrated showerhead with thermal control for delivering radical and precursor gas to a downstream chamber to enable remote plasma film deposition
LAM RES CORP6 citations83
US10604841B2Mar 31, 2020
Integrated showerhead with thermal control for delivering radical and precursor gas to a downstream chamber to enable remote plasma film deposition
LAM RES CORP7 citations82
US12000047B2Jun 4, 2024
Integrated showerhead with thermal control for delivering radical and precursor gas to a downstream chamber to enable remote plasma film deposition
LAM RES CORP1 citations71
US11101164B2Aug 24, 2021
Integrated showerhead with thermal control for delivering radical and precursor gas to a downstream chamber to enable remote plasma film deposition
LAM RES CORP3 citations71
US12331402B2Jun 17, 2025
Integrated showerhead with thermal control for delivering radical and precursor gas to a downstream chamber to enable remote plasma film deposition
LAM RES CORP0 citations61