Inventor

GUI ZHE

US17 patents

⚠️ This page may combine multiple inventors who share the name “GUI ZHE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

GUI ZHE

LAM RES CORP

Densification of silicon carbide film using remote plasma treatment

Remote plasma based deposition of graded or multi-layered silicon carbide film

Integrated showerhead with thermal control for delivering radical and precursor gas to a downstream chamber to enable remote plasma film deposition

Integrated showerhead with thermal control for delivering radical and precursor gas to a downstream chamber to enable remote plasma film deposition

Integrated showerhead with improved hole pattern for delivering radical and precursor gas to a downstream chamber to enable remote plasma film deposition

Conformal deposition of silicon carbide films using heterogeneous precursor interaction

Remote plasma based deposition of silicon carbide films using silicon-containing and carbon-containing precursors

Integrated showerhead with improved hole pattern for delivering radical and precursor gas to a downstream chamber to enable remote plasma film deposition

Integrated showerhead with thermal control for delivering radical and precursor gas to a downstream chamber to enable remote plasma film deposition

Integrated showerhead with thermal control for delivering radical and precursor gas to a downstream chamber to enable remote plasma film deposition

Methods and apparatus for depositing silicon oxide on metal layers

Integrated showerhead with thermal control for delivering radical and precursor gas to a downstream chamber to enable remote plasma film deposition

Wafer level uniformity control in remote plasma film deposition

NOVELLUS SYSTEMS INC

Conformal deposition of silicon carbide films

Conformal deposition of silicon carbide films

Conformal deposition of silicon carbide films

Conformal deposition of silicon carbide films