Inventor
CHANG SONG YUAN
TW16 patents
⚠️ This page may combine multiple inventors who share the name “CHANG SONG YUAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG CO LTD
5 patentsUS9994736B2Jun 12, 2018
Slurry composition for chemical mechanical polishing of GE-based materials and devices
TAIWAN SEMICONDUCTOR MFG CO LTD4 citations83
US9530655B2Dec 27, 2016
Slurry composition for chemical mechanical polishing of Ge-based materials and devices
TAIWAN SEMICONDUCTOR MFG CO LTD6 citations83
US9416297B2Aug 16, 2016
Chemical mechanical polishing method using slurry composition containing N-oxide compound
TAIWAN SEMICONDUCTOR MFG CO LTD7 citations82
US11193043B2Dec 7, 2021
System for chemical mechanical polishing of Ge-based materials and devices
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US9881803B2Jan 30, 2018
Chemical mechanical polishing method using slurry composition containing N-oxide compound
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations50
CHANG SONG-YUAN
3 patentsUS8337716B2Dec 25, 2012
Sarcosine compound used as corrosion inhibitor
CHANG SONG-YUAN6 citations81
US8641920B2Feb 4, 2014
Polishing composition for planarizing metal layer
CHANG SONG-YUAN6 citations70
US8901001B2Dec 2, 2014
Slurry composition and method of fabricating damascene structure using the same
CHANG SONG-YUAN2 citations59