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Inventor
LU MING HUI
TW
9 patents
⚠️ This page may combine multiple inventors who share the name “LU MING HUI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
UWIZ TECH CO LTD
3 patents
US9718991B2
Aug 1, 2017
Chemical mechanical polishing slurry
UWIZ TECH CO LTD
0 citations
45
US10501660B2
Dec 10, 2019
Method of selectively removing tungsten over silicon oxide
UWIZ TECH CO LTD
0 citations
36
US9493678B2
Nov 15, 2016
Polishing composition
UWIZ TECH CO LTD
0 citations
36
CHANG SONG-YUAN
2 patents
US8641920B2
Feb 4, 2014
Polishing composition for planarizing metal layer
CHANG SONG-YUAN
6 citations
70
US8901001B2
Dec 2, 2014
Slurry composition and method of fabricating damascene structure using the same
CHANG SONG-YUAN
2 citations
59
UWIZ TECHNOLOGY CO LTD
2 patents
US9165760B2
Oct 20, 2015
Cleaning composition and cleaning method using the same
UWIZ TECHNOLOGY CO LTD
4 citations
67
US7763577B1
Jul 27, 2010
Acidic post-CMP cleaning composition
UWIZ TECHNOLOGY CO LTD
5 citations
55
CHEN WEI-JUNG
1 patent
US9039925B2
May 26, 2015
Polishing slurry composition
CHEN WEI-JUNG
6 citations
65
HO YUN-LUNG
1 patent
US8747693B2
Jun 10, 2014
Silica having metal ions absorbed thereon and fabricating method thereof
HO YUN-LUNG
0 citations
43