Inventor
RIST STEFAN
DE5 patents
⚠️ This page may combine multiple inventors who share the name “RIST STEFAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ZEISS CARL SMT GMBH
3 patentsUS9910364B2Mar 6, 2018
Projection exposure apparatus including at least one mirror
ZEISS CARL SMT GMBH3 citations71
US9927714B2Mar 27, 2018
Projection exposure apparatus with at least one manipulator
ZEISS CARL SMT GMBH3 citations70
US9823578B2Nov 21, 2017
Control device for controlling at least one manipulator of a projection lens
ZEISS CARL SMT GMBH2 citations68