Inventor
BOOMGARDEN MARK D
US21 patents
Patents
21 patentsUS10217930B1Feb 26, 2019
Method of manufacture for single crystal acoustic resonator devices using micro-vias
AKOUSTIS INC21 citations94
US10110190B2Oct 23, 2018
Structure and method of manufacture for acoustic resonator or filter devices using improved fabrication conditions and perimeter structure modifications
AKOUSTIS INC10 citations92
US10110189B2Oct 23, 2018
Structure and method of manufacture for acoustic resonator or filter devices using improved fabrication conditions and perimeter structure modifications
AKOUSTIS INC3 citations83
US10110188B2Oct 23, 2018
Structure and method of manufacture for acoustic resonator or filter devices using improved fabrication conditions and perimeter structure modifications
AKOUSTIS INC7 citations83
US10957688B2Mar 23, 2021
Monolithic single chip integrated radio frequency front end module configured with single crystal acoustic filter devices
AKOUSTIS INC2 citations73
US10855250B2Dec 1, 2020
Communication filter for LTE band 41
AKOUSTIS INC3 citations73
US10615773B2Apr 7, 2020
Wireless communication infrastructure system configured with a single crystal piezo resonator and filter structure
AKOUSTIS INC3 citations73
US10581398B2Mar 3, 2020
Method of manufacture for single crystal acoustic resonator devices using micro-vias
AKOUSTIS INC3 citations73
US10256786B1Apr 9, 2019
Communication filter using single crystal acoustic resonator devices
AKOUSTIS INC4 citations73
US11728781B2Aug 15, 2023
Method for fabricating an acoustic resonator device with perimeter structures
AKOUSTIS INC1 citations72
US10431580B1Oct 1, 2019
Monolithic single chip integrated radio frequency front end module configured with single crystal acoustic filter devices
AKOUSTIS INC4 citations72
US12278607B2Apr 15, 2025
Method for fabricating an acoustic resonator device with perimeter structures
AKOUSTIS INC0 citations62
US11881831B2Jan 23, 2024
Method of manufacture for single crystal acoustic resonator devices using micro-vias
AKOUSTIS INC0 citations62
US11563412B2Jan 24, 2023
Structure and method of manufacture for acoustic resonator or filter devices using improved fabrication conditions and perimeter structure modifications
AKOUSTIS INC0 citations62
US11165404B2Nov 2, 2021
Method for fabricating an acoustic resonator device with perimeter structures
AKOUSTIS INC0 citations62
US11063204B2Jul 13, 2021
Method of manufacture for single crystal acoustic resonator devices using micro-vias
AKOUSTIS INC0 citations62
US10992279B2Apr 27, 2021
Structure and method of manufacture for acoustic resonator or filter devices using improved fabrication conditions and perimeter structure modifications
AKOUSTIS INC0 citations62
US10979011B2Apr 13, 2021
Structure and method of manufacture for acoustic resonator or filter devices using improved fabrication conditions and perimeter structure modifications
AKOUSTIS INC0 citations62
US10931251B2Feb 23, 2021
Structure and method of manufacture for acoustic resonator or filter devices using improved fabrication conditions and perimeter structure modifications
AKOUSTIS INC0 citations62
US11581306B2Feb 14, 2023
Monolithic single chip integrated radio frequency front end module configured with single crystal acoustic filter devices
AKOUSTIS INC0 citations61
US11558023B2Jan 17, 2023
Method for fabricating an acoustic resonator device
AKOUSTIS INC0 citations51