Inventor
AHN JAE YUN
KR5 patents
Patents
5 patentsUS11500291B2Nov 15, 2022
Underlying coating compositions for use with photoresists
ROHM & HAAS ELECT MATERIALS KOREA LTD0 citations59
US10514604B2Dec 24, 2019
Overcoat compositions and methods for photolithography
ROHM & HAAS ELECT MATERIALS KOREA LTD1 citations59
US11269252B2Mar 8, 2022
Method for forming pattern using antireflective coating composition including photoacid generator
ROHM & HAAS ELECT MATERIALS KOREA LTD0 citations49
US10274824B2Apr 30, 2019
Photobase generators and photoresist compositions comprising same
ROHM & HAAS ELECT MATERIALS KOREA LTD0 citations46
US12572076B2Mar 10, 2026
Photoresist underlayer composition
ROHM & HAAS ELECT MATERIALS KOREA LTD0 citations45