Inventor
NAGARAJAN ARUN
US11 patents
⚠️ This page may combine multiple inventors who share the name “NAGARAJAN ARUN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI METALS LTD
6 patentsUS10126761B2Nov 13, 2018
Gas insensitive mass flow control systems and methods
HITACHI METALS LTD6 citations82
US9605992B2Mar 28, 2017
On-tool mass flow controller diagnostic systems and methods
HITACHI METALS LTD2 citations71
US9488516B2Nov 8, 2016
On-tool mass flow controller diagnostic systems and methods
HITACHI METALS LTD3 citations71
US9846073B2Dec 19, 2017
On-tool mass flow controller diagnostic systems and methods
HITACHI METALS LTD0 citations51
US10534375B2Jan 14, 2020
Gas insensitive mass flow control systems and methods
HITACHI METALS LTD0 citations50
US9766635B2Sep 19, 2017
Mass flow controller with onboard diagnostics, prognostics, and data logging
HITACHI METALS LTD0 citations50
ILLINOIS TOOL WORKS
3 patentsUS12259739B2Mar 25, 2025
Advanced pressure based mass flow controllers and diagnostics
ILLINOIS TOOL WORKS0 citations44
US12181328B2Dec 31, 2024
Flow through pressure sensor structured to remove dead volume
ILLINOIS TOOL WORKS0 citations42
US11669111B2Jun 6, 2023
Valve assembly and system used to control flow rate of a fluid
ILLINOIS TOOL WORKS0 citations41