Inventor
PLAVIDAL RICHARD W
US13 patents
⚠️ This page may combine multiple inventors who share the name “PLAVIDAL RICHARD W”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
11 patentsUS6251217B1Jun 26, 2001
Reticle adapter for a reactive ion etch system
APPLIED MATERIALS INC41 citations95
US5718795AFeb 17, 1998
Radial magnetic field enhancement for plasma processing
APPLIED MATERIALS INC48 citations92
US5462080AOct 31, 1995
Heated removable throttle valve
APPLIED MATERIALS INC35 citations89
US10546762B2Jan 28, 2020
Drying high aspect ratio features
APPLIED MATERIALS INC6 citations71
US6607634B2Aug 19, 2003
Reticle adapter for a reactive ion etch system
APPLIED MATERIALS INC4 citations62
US10971354B2Apr 6, 2021
Drying high aspect ratio features
APPLIED MATERIALS INC0 citations61
US12312702B2May 27, 2025
Plating systems having reduced air entrainment
APPLIED MATERIALS INC0 citations56
US11814744B2Nov 14, 2023
Substrate cleaning components and methods in a plating system
APPLIED MATERIALS INC0 citations56
US12074106B2Aug 27, 2024
Fan-out interconnect integration processes and structures
APPLIED MATERIALS INC0 citations55
US11699651B2Jul 11, 2023
Fan-out interconnect integration processes and structures
APPLIED MATERIALS INC1 citations55
US10373864B2Aug 6, 2019
Systems and methods for wetting substrates
APPLIED MATERIALS INC1 citations55