Inventor
KALISKY MATUS
DE4 patents
Patents
4 patentsUS11054305B2Jul 6, 2021
Method and device for beam analysis
ZEISS CARL SMT GMBH1 citations60
US10605654B2Mar 31, 2020
Method and device for beam analysis
ZEISS CARL SMT GMBH1 citations60
US10331048B2Jun 25, 2019
Mirror, in particular for a microlithographic projection exposure apparatus
ZEISS CARL SMT GMBH1 citations59
US10520827B2Dec 31, 2019
Optical system, in particular for a microlithographic projection exposure apparatus
ZEISS CARL SMT GMBH0 citations38