Inventor
KLOSE THOMAS
DE17 patents
⚠️ This page may combine multiple inventors who share the name “KLOSE THOMAS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
FRAUNHOFER GES FORSCHUNG
8 patentsUS7466474B2Dec 16, 2008
Micromechanical device with tilted electrodes
FRAUNHOFER GES FORSCHUNG13 citations82
US7369288B2May 6, 2008
Micromechanical optical element having a reflective surface as well as its use
FRAUNHOFER GES FORSCHUNG8 citations72
US7940439B2May 10, 2011
Method for generating a micromechanical structure
FRAUNHOFER GES FORSCHUNG3 citations61
US7932788B2Apr 26, 2011
Oscillating, deflectable micromechanical element and method for use thereof
FRAUNHOFER GES FORSCHUNG3 citations61
US8379283B2Feb 19, 2013
Micromechanical element and sensor for monitoring a micromechanical element
FRAUNHOFER GES FORSCHUNG4 citations60
US7830577B2Nov 9, 2010
Micromechanical device with adjustable resonant frequency by geometry alteration and method for operating same
FRAUNHOFER GES FORSCHUNG3 citations60
US7951635B2May 31, 2011
Method for the compensation of deviations occurring as a result of manufacture in the manufacture of micromechanical elements and their use
FRAUNHOFER GES FORSCHUNG1 citations51
US7679152B2Mar 16, 2010
Micromechanical device, micromechanical system, apparatus for adjusting sensitivity of a micromechanical device, method for producing a micromechanical device
FRAUNHOFER GES FORSCHUNG1 citations42