Inventor
IWASHITA SHINYA
JP14 patents
⚠️ This page may combine multiple inventors who share the name “IWASHITA SHINYA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
6 patentsUS11450512B2Sep 20, 2022
Plasma processing method
TOKYO ELECTRON LTD2 citations72
US11081322B2Aug 3, 2021
Film forming apparatus, cleaning method for film forming apparatus and recording medium
TOKYO ELECTRON LTD5 citations70
US10872764B2Dec 22, 2020
Film forming method
TOKYO ELECTRON LTD0 citations51
US12362143B2Jul 15, 2025
Plasma processing apparatus and plasma processing method
TOKYO ELECTRON LTD0 citations50
US12027344B2Jul 2, 2024
Film forming apparatus
TOKYO ELECTRON LTD0 citations49
US11658008B2May 23, 2023
Film forming apparatus and film forming method
TOKYO ELECTRON LTD0 citations49
ASM IP HOLDING BV
5 patentsUS11885014B2Jan 30, 2024
Transition metal nitride deposition method
ASM IP HOLDING BV3 citations74
US12406881B2Sep 2, 2025
Methods and systems for filling a gap
ASM IP HOLDING BV1 citations63
US12404583B2Sep 2, 2025
Transition metal nitride deposition method
ASM IP HOLDING BV0 citations62
US11854876B2Dec 26, 2023
Systems and methods for cobalt metalization
ASM IP HOLDING BV0 citations62
US12217954B2Feb 4, 2025
Method of cleaning a surface
ASM IP HOLDING BV0 citations60