Inventor
KALATHIPARAMBIL KISHOR
US4 patents
Patents
4 patentsUS11289312B2Mar 29, 2022
Physical vapor deposition (PVD) chamber with in situ chamber cleaning capability
APPLIED MATERIALS INC4 citations71
US11473189B2Oct 18, 2022
Method for particle removal from wafers through plasma modification in pulsed PVD
APPLIED MATERIALS INC2 citations70
US11222816B2Jan 11, 2022
Methods and apparatus for semi-dynamic bottom up reflow
APPLIED MATERIALS INC0 citations60
US11932934B2Mar 19, 2024
Method for particle removal from wafers through plasma modification in pulsed PVD
APPLIED MATERIALS INC0 citations59