Inventor
CHIN CHI-HANG
TW3 patents
Patents
3 patentsUS11279611B2Mar 22, 2022
Micro-electro mechanical system device containing a bump stopper and methods for forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations70
US11970387B2Apr 30, 2024
Micro-electro mechanical system device containing a bump stopper and methods for forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US10351417B2Jul 16, 2019
MEMS device with viewer window and manufacturing method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations50