Inventor
SUZUKI SHOI
JP10 patents
⚠️ This page may combine multiple inventors who share the name “SUZUKI SHOI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CENTRAL GLASS CO LTD
7 patentsUS11715641B2Aug 1, 2023
Method and device for etching silicon oxide
CENTRAL GLASS CO LTD3 citations71
US12387940B2Aug 12, 2025
Dry etching method
CENTRAL GLASS CO LTD0 citations61
US12125709B2Oct 22, 2024
Method and device for etching silicon oxide
CENTRAL GLASS CO LTD0 citations61
US11289340B2Mar 29, 2022
Dry etching method
CENTRAL GLASS CO LTD0 citations61
US11049729B2Jun 29, 2021
Dry etching method, semiconductor device manufacturing method, and chamber cleaning method
CENTRAL GLASS CO LTD1 citations61
US11251051B2Feb 15, 2022
Dry etching method
CENTRAL GLASS CO LTD0 citations50
US12371618B2Jul 29, 2025
Dry etching method, method for producing semiconductor device, and dry etching gas composition
CENTRAL GLASS CO LTD0 citations45