Inventor
KIYOI AKIRA
JP3 patents
Patents
3 patentsUS11881504B2Jan 23, 2024
Semiconductor device and manufacturing method therefor
MITSUBISHI ELECTRIC CORP0 citations56
US9922836B2Mar 20, 2018
Semiconductor device manufacturing method and semiconductor device
MITSUBISHI ELECTRIC CORP0 citations44
US11676996B2Jun 13, 2023
Method of manufacturing semiconductor device, and semiconductor device
MITSUBISHI ELECTRIC CORP0 citations39