Inventor

DEGUCHI KIMIYOSHI

JP2 patents

Patents

2 patents

US4656347AApr 7, 1987

Diffraction grating position adjuster using a grating and a reflector

NIPPON TELEGRAPH & TELEPHONE45 citations89

US5414746AMay 9, 1995

X-ray exposure mask and fabrication method thereof

NIPPON TELEGRAPH & TELEPHONE11 citations68