P

Inventor

MATSUDA TADAHITO

JP9 patents
⚠️ This page may combine multiple inventors who share the name “MATSUDA TADAHITO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

NIPPON TELEGRAPH & TELEPHONE

4 patents
US5636004AJun 3, 1997

Projection exposure method and apparatus

NIPPON TELEGRAPH & TELEPHONE31 citations88
US4634645AJan 6, 1987

Method of forming resist micropattern

NIPPON TELEGRAPH & TELEPHONE18 citations72
US5414746AMay 9, 1995

X-ray exposure mask and fabrication method thereof

NIPPON TELEGRAPH & TELEPHONE11 citations68
US4437008AMar 13, 1984

Electron beam control system

NIPPON TELEGRAPH & TELEPHONE5 citations62

SHINETSU CHEMICAL CO

3 patents
US5624787AApr 29, 1997

Chemically amplified positive resist composition

SHINETSU CHEMICAL CO31 citations92
US6841334B2Jan 11, 2005

Onium salts and positive resist materials using the same

SHINETSU CHEMICAL CO6 citations73
US6667415B1Dec 23, 2003

Tertiary butyl 4,4-bis(4′-hydroxyphenyl) pentanoate derivatives and positive resist materials containing the same

SHINETSU CHEMICAL CO2 citations63

HITACHI LTD

2 patents
US4489241ADec 18, 1984

Exposure method with electron beam exposure apparatus

HITACHI LTD12 citations72
US4808829AFeb 28, 1989

Mark position detection system for use in charged particle beam apparatus

HITACHI LTD8 citations71