Inventor
HAEFNER HANS-ULRICH
DE5 patents
Patents
5 patentsUS4958499ASep 25, 1990
Method and apparatus for checking the operation of a refrigerator-operated cryogenic pump
LEYBOLD AG55 citations94
US5111667AMay 12, 1992
Two-stage cryopump
LEYBOLD AG25 citations90
US5542257AAug 6, 1996
Cryogenic pump with an essentially cup-shaped housing
LEYBOLD AG30 citations88
US5400604AMar 28, 1995
Cryopump and process for regenerating said cryopump
LEYBOLD AG32 citations88
US4953359ASep 4, 1990
Method of adapting a two-stage refrigerator cryopump to a specific gas
LEYBOLD AG17 citations71