Inventor

TOMPKINS ROBERT

US3 patents

Patents

3 patents

US6268994B1Jul 31, 2001

Electrostatic chuck and method of manufacture

DORSEY GAGE INC44 citations89

US5905626AMay 18, 1999

Electrostatic chuck with ceramic pole protection

DORSEY GAGE INC16 citations69

US5901030AMay 4, 1999

Electrostatic chuck employing thermoelectric cooling

DORSEY GAGE INC7 citations69