Inventor
TSUNETA RURIKO
JP18 patents
⚠️ This page may combine multiple inventors who share the name “TSUNETA RURIKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI LTD
8 patentsUS6570156B1May 27, 2003
Autoadjusting electron microscope
HITACHI LTD100 citations98
US6838667B2Jan 4, 2005
Method and apparatus for charged particle beam microscopy
HITACHI LTD59 citations96
US6051834AApr 18, 2000
Electron microscope
HITACHI LTD65 citations96
US5866905AFeb 2, 1999
Electron microscope
HITACHI LTD74 citations96
US6888139B2May 3, 2005
Electron microscope
HITACHI LTD28 citations92
US5650621AJul 22, 1997
Electron microscope
HITACHI LTD31 citations92
US5453617ASep 26, 1995
Electron microscope for specimen composition and strain analysis and observation method thereof
HITACHI LTD36 citations92
US7141790B2Nov 28, 2006
Defect inspection instrument and positron beam apparatus
HITACHI LTD4 citations62
HITACHI HIGH TECH CORP
6 patentsUS7372029B2May 13, 2008
Scanning transmission electron microscope and scanning transmission electron microscopy
HITACHI HIGH TECH CORP15 citations92
US7633064B2Dec 15, 2009
Electric charged particle beam microscopy and electric charged particle beam microscope
HITACHI HIGH TECH CORP11 citations84
US7372051B2May 13, 2008
Electric charged particle beam microscopy, electric charged particle beam microscope, critical dimension measurement and critical dimension measurement system
HITACHI HIGH TECH CORP19 citations83
US7863564B2Jan 4, 2011
Electric charged particle beam microscope and microscopy
HITACHI HIGH TECH CORP13 citations82
US7227144B2Jun 5, 2007
Scanning transmission electron microscope and scanning transmission electron microscopy
HITACHI HIGH TECH CORP7 citations73
US8963102B2Feb 24, 2015
Charged particle beam microscope, sample holder for charged particle beam microscope, and charged particle beam microscopy
HITACHI HIGH TECH CORP1 citations51