Inventor
HAYDEN DENNIS M
US8 patents
Patents
8 patentsUS6190836B1Feb 20, 2001
Methods for repair of photomasks
IBM75 citations95
US6165649ADec 26, 2000
Methods for repair of photomasks
IBM70 citations95
US6090507AJul 18, 2000
Methods for repair of photomasks
IBM76 citations95
US6156461ADec 5, 2000
Method for repair of photomasks
IBM26 citations91
US6346352B1Feb 12, 2002
Quartz defect removal utilizing gallium staining and femtosecond ablation
IBM49 citations88
US6534225B2Mar 18, 2003
Tapered ion implantation with femtosecond laser ablation to remove printable alternating phase shift features
IBM17 citations82
US6515736B1Feb 4, 2003
Reticle capturing and handling system
IBM11 citations73
US6582857B1Jun 24, 2003
Repair of masks to promote adhesion of patches
IBM11 citations70