Inventor

LEVIN J PETER

US4 patents

Patents

4 patents

US6190836B1Feb 20, 2001

Methods for repair of photomasks

IBM75 citations95

US6165649ADec 26, 2000

Methods for repair of photomasks

IBM70 citations95

US6090507AJul 18, 2000

Methods for repair of photomasks

IBM76 citations95

US6156461ADec 5, 2000

Method for repair of photomasks

IBM26 citations91