Inventor
NEARY TIMOTHY E
US18 patents
Patents
18 patentsUS6016357AJan 18, 2000
Feedback method to repair phase shift masks
IBM201 citations99
US6190836B1Feb 20, 2001
Methods for repair of photomasks
IBM75 citations95
US6165649ADec 26, 2000
Methods for repair of photomasks
IBM70 citations95
US6090507AJul 18, 2000
Methods for repair of photomasks
IBM76 citations95
US6338409B1Jan 15, 2002
Reticle SMIF pod in situ orientation
IBM39 citations92
US6156461ADec 5, 2000
Method for repair of photomasks
IBM26 citations91
US6110624AAug 29, 2000
Multiple polarity mask exposure method
IBM21 citations90
US5498313AMar 12, 1996
Symmetrical etching ring with gas control
IBM41 citations89
US6346352B1Feb 12, 2002
Quartz defect removal utilizing gallium staining and femtosecond ablation
IBM49 citations88
US7932614B2Apr 26, 2011
Method of thinning a semiconductor substrate
IBM12 citations83
US7867876B2Jan 11, 2011
Method of thinning a semiconductor substrate
IBM7 citations83
US6534225B2Mar 18, 2003
Tapered ion implantation with femtosecond laser ablation to remove printable alternating phase shift features
IBM17 citations82
US5981110ANov 9, 1999
Method for repairing photomasks
IBM19 citations80
US6515736B1Feb 4, 2003
Reticle capturing and handling system
IBM11 citations73
US6415431B1Jul 2, 2002
Repair of phase shift materials to enhance adhesion
IBM8 citations73
US6582857B1Jun 24, 2003
Repair of masks to promote adhesion of patches
IBM11 citations70
US6261723B1Jul 17, 2001
Transfer layer repair process for attenuated masks
IBM10 citations69
US7844099B2Nov 30, 2010
Inspection method for protecting image sensor devices with front surface protection
IBM1 citations49