Inventor
KASHIWAGI AKIHIDE
JP6 patents
Patents
6 patentsUS6297172B1Oct 2, 2001
Method of forming oxide film
SONY CORP121 citations95
US6239044B1May 29, 2001
Apparatus for forming silicon oxide film and method of forming silicon oxide film
SONY CORP66 citations95
US6797323B1Sep 28, 2004
Method of forming silicon oxide layer
SONY CORP43 citations92
US6589349B2Jul 8, 2003
Apparatus for forming silicon oxide film and method of forming silicon oxide film
SONY CORP17 citations92
US5506178AApr 9, 1996
Process for forming gate silicon oxide film for MOS transistors
SONY CORP29 citations92
US5854505ADec 29, 1998
Process for forming silicon oxide film and gate oxide film for MOS transistors
SONY CORP13 citations73