Inventor
SAKAMORI SHIGENORI
JP10 patents
⚠️ This page may combine multiple inventors who share the name “SAKAMORI SHIGENORI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MITSUBISHI ELECTRIC CORP
8 patentsUS6232209B1May 15, 2001
Semiconductor device and manufacturing method thereof
MITSUBISHI ELECTRIC CORP58 citations93
US5668052ASep 16, 1997
Method of manufacturing semiconductor device
MITSUBISHI ELECTRIC CORP37 citations92
US6156152ADec 5, 2000
Plasma processing apparatus
MITSUBISHI ELECTRIC CORP45 citations91
US5877081AMar 2, 1999
Method of manufacturing semiconductor device
MITSUBISHI ELECTRIC CORP14 citations73
US6156639ADec 5, 2000
Method for manufacturing contact structure
MITSUBISHI ELECTRIC CORP11 citations71
US6346482B2Feb 12, 2002
Semiconductor device having an improved contact structure and a manufacturing method thereof
MITSUBISHI ELECTRIC CORP13 citations69
US6638777B2Oct 28, 2003
Apparatus for and method of etching
MITSUBISHI ELECTRIC CORP3 citations61
US6340844B1Jan 22, 2002
Semiconductor device having improved contact hole structure, and method of manufacturing the same
MITSUBISHI ELECTRIC CORP4 citations61