Inventor
TERATANI AKEMI
JP3 patents
Patents
3 patentsUS6232209B1May 15, 2001
Semiconductor device and manufacturing method thereof
MITSUBISHI ELECTRIC CORP58 citations93
US6346482B2Feb 12, 2002
Semiconductor device having an improved contact structure and a manufacturing method thereof
MITSUBISHI ELECTRIC CORP13 citations69
US6452277B1Sep 17, 2002
Semiconductor device and manufacturing method thereof
MITSUBISHI ELECTRIC CORP10 citations68