Inventor
KUSUMI YOSHIHIRO
JP5 patents
Patents
5 patentsUS6228755B1May 8, 2001
Semiconductor device, and manufacturing method therefor
MITSUBISHI ELECTRIC CORP16 citations82
US6548900B1Apr 15, 2003
Semiconductor device and fabrication method thereof
MITSUBISHI ELECTRIC CORP18 citations81
US6156639ADec 5, 2000
Method for manufacturing contact structure
MITSUBISHI ELECTRIC CORP11 citations71
US6022810AFeb 8, 2000
Method of manufacturing semiconductor device
MITSUBISHI ELECTRIC CORP7 citations70
US6346482B2Feb 12, 2002
Semiconductor device having an improved contact structure and a manufacturing method thereof
MITSUBISHI ELECTRIC CORP13 citations69