Inventor
YAMANAKA NOBUAKI
JP6 patents
Patents
6 patentsUS6346482B2Feb 12, 2002
Semiconductor device having an improved contact structure and a manufacturing method thereof
MITSUBISHI ELECTRIC CORP13 citations69
US10211056B2Feb 19, 2019
Semiconductor device manufacturing method
MITSUBISHI ELECTRIC CORP0 citations45
US9881818B2Jan 30, 2018
Method for manufacturing semiconductor device
MITSUBISHI ELECTRIC CORP0 citations41
US10074578B2Sep 11, 2018
Semiconductor device and method for producing the same
MITSUBISHI ELECTRIC CORP0 citations31
US10677585B2Jun 9, 2020
Film thickness measuring apparatus
MITSUBISHI ELECTRIC CORP0 citations30
US10242876B2Mar 26, 2019
Method for manufacturing semiconductor device
MITSUBISHI ELECTRIC CORP0 citations30