Inventor
LANSFORD JEREMY
US13 patents
Patents
13 patentsUS6567718B1May 20, 2003
Method and apparatus for monitoring consumable performance
ADVANCED MICRO DEVICES INC85 citations97
US6217412B1Apr 17, 2001
Method for characterizing polish pad lots to eliminate or reduce tool requalification after changing a polishing pad
ADVANCED MICRO DEVICES INC71 citations96
US6213848B1Apr 10, 2001
Method for determining a polishing recipe based upon the measured pre-polish thickness of a process layer
ADVANCED MICRO DEVICES INC44 citations96
US6276989B1Aug 21, 2001
Method and apparatus for controlling within-wafer uniformity in chemical mechanical polishing
ADVANCED MICRO DEVICES INC56 citations95
US6746616B1Jun 8, 2004
Method and apparatus for providing etch uniformity using zoned temperature control
ADVANCED MICRO DEVICES INC43 citations92
US6511898B1Jan 28, 2003
Method for controlling deposition parameters based on polysilicon grain size feedback
ADVANCED MICRO DEVICES INC25 citations92
US6485990B1Nov 26, 2002
Feed-forward control of an etch processing tool
ADVANCED MICRO DEVICES INC19 citations92
US6352870B1Mar 5, 2002
Method of endpointing plasma strip process by measuring wafer temperature
ADVANCED MICRO DEVICES INC23 citations92
US6350179B2Feb 26, 2002
Method for determining a polishing recipe based upon the measured pre-polish thickness of a process layer
ADVANCED MICRO DEVICES INC31 citations92
US6157078ADec 5, 2000
Reduced variation in interconnect resistance using run-to-run control of chemical-mechanical polishing during semiconductor fabrication
ADVANCED MICRO DEVICES INC42 citations92
US6362116B1Mar 26, 2002
Method for controlling photoresist baking processes
ADVANCED MICRO DEVICES INC16 citations83
US6335286B1Jan 1, 2002
Feedback control of polish buff time as a function of scratch count
ADVANCED MICRO DEVICES INC14 citations83
US6291253B1Sep 18, 2001
Feedback control of deposition thickness based on polish planarization
ADVANCED MICRO DEVICES INC12 citations73