Inventor

YAO YAHONG

US12 patents

⚠️ This page may combine multiple inventors who share the name “YAO YAHONG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SIARGO LTD

4 patents

US7780343B2Aug 24, 2010

Micromachined gas and liquid concentration sensor and method of making the same

SIARGO LTD20 citations92

US7536908B2May 26, 2009

Micromachined thermal mass flow sensors and insertion type flow meters and manufacture methods

SIARGO LTD21 citations92

US7908096B2Mar 15, 2011

Integrated micromachined thermal mass flow sensor and methods of making the same

SIARGO LTD16 citations83

US7878056B2Feb 1, 2011

Micromachined thermal mass flow sensor with self-cleaning capability and methods of making the same

SIARGO LTD17 citations83

SIARGO INC

2 patents

US7752910B2Jul 13, 2010

Micromachined mass flow sensor and methods of making the same

SIARGO INC13 citations91

US7765679B2Aug 3, 2010

Method of manufacturing a flow rate sensor

SIARGO INC13 citations79

HUANG LIJI

2 patents

US8794082B2Aug 5, 2014

MEMS time-of-flight thermal mass flow meter

HUANG LIJI6 citations72

US11927555B2Mar 12, 2024

Micromachined thermal time-of-flight fluidic concentration metering device

HUANG LIJI0 citations52

INTPAX INC

1 patent

US6620712B2Sep 16, 2003

Defined sacrifical region via ion implantation for micro-opto-electro-mechanical system (MOEMS) applications

INTPAX INC18 citations82

CHEN CHIH-CHANG

1 patent

US8132455B2Mar 13, 2012

Robust micromachined thermal mass flow sensor with double side passivated polyimide membrane

CHEN CHIH-CHANG4 citations61

(unassigned)

1 patent

US6781735B2Aug 24, 2004

Fabry-Perot cavity manufactured with bulk micro-machining process applied on supporting substrate

CHEN CHIH CHANG

1 patent

US10908006B2Feb 2, 2021

Method for forming micromachined liquid flow sensor

CHEN CHIH CHANG0 citations51