Inventor
OHMORI TAKESHI
JP28 patents
⚠️ This page may combine multiple inventors who share the name “OHMORI TAKESHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI HIGH TECH CORP
14 patentsUS10008370B2Jun 26, 2018
Plasma processing apparatus and operation method thereof
HITACHI HIGH TECH CORP23 citations94
US10453695B2Oct 22, 2019
Plasma processing apparatus and plasma processing method
HITACHI HIGH TECH CORP7 citations84
US10672595B2Jun 2, 2020
Plasma processing apparatus and operation method thereof
HITACHI HIGH TECH CORP3 citations73
US10665516B2May 26, 2020
Etching method and plasma processing apparatus
HITACHI HIGH TECH CORP3 citations72
US11907235B2Feb 20, 2024
Plasma processing apparatus including predictive control
HITACHI HIGH TECH CORP2 citations71
US11657059B2May 23, 2023
Search device, searching method, and plasma processing apparatus
HITACHI HIGH TECH CORP2 citations71
US12345522B2Jul 1, 2025
Computer system, dimension measurement method, and storage medium
HITACHI HIGH TECH CORP0 citations61
US12094146B2Sep 17, 2024
Contour analysis apparatus, processing condition determination system, shape estimation system, semiconductor device manufacturing system, search apparatus, and data structure used in them
HITACHI HIGH TECH CORP0 citations61
US12450520B2Oct 21, 2025
Experiment point recommendation device, experiment point recommendation method, and semiconductor device manufacturing device
HITACHI HIGH TECH CORP0 citations51
US11600536B2Mar 7, 2023
Dimension measurement apparatus, dimension measurement program, and semiconductor manufacturing system
HITACHI HIGH TECH CORP0 citations51
US11189470B2Nov 30, 2021
Search device, search method and plasma processing apparatus
HITACHI HIGH TECH CORP0 citations51
US12222690B2Feb 11, 2025
Process recipe search apparatus, etching recipe search method and semiconductor device manufacturing system
HITACHI HIGH TECH CORP0 citations50
US11747774B2Sep 5, 2023
Search device, search program, and plasma processing apparatus
HITACHI HIGH TECH CORP0 citations50
US12320630B2Jun 3, 2025
Dimension measurement apparatus, semiconductor manufacturing apparatus, and semiconductor device manufacturing system
HITACHI HIGH TECH CORP0 citations47
HITACHI LTD
10 patentsUS11152237B2Oct 19, 2021
Substitute sample, method for determining control parameter of processing, and measurement system
HITACHI LTD2 citations72
US11287782B2Mar 29, 2022
Computer, method for determining processing control parameter, substitute sample, measurement system, and measurement method
HITACHI LTD1 citations62
US10627788B2Apr 21, 2020
Retrieval apparatus and retrieval method for semiconductor device processing
HITACHI LTD1 citations62
US11663713B2May 30, 2023
Image generation system
HITACHI LTD0 citations61
US11393084B2Jul 19, 2022
Processing recipe generation device
HITACHI LTD1 citations61
US12511574B2Dec 30, 2025
Processing condition search device and processing condition search method
HITACHI LTD0 citations51
US11112775B2Sep 7, 2021
System and method of determining processing condition
HITACHI LTD0 citations51
US11609188B2Mar 21, 2023
Processing condition determination system and processing condition searching method
HITACHI LTD0 citations50
US12437959B2Oct 7, 2025
Charged particle beam device, and sample observation method employing same
HITACHI LTD0 citations48
US10734261B2Aug 4, 2020
Search apparatus and search method
HITACHI LTD0 citations41