Inventor
OKUYAMA YUTAKA
JP14 patents
⚠️ This page may combine multiple inventors who share the name “OKUYAMA YUTAKA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI HIGH TECH CORP
6 patentsUS11907235B2Feb 20, 2024
Plasma processing apparatus including predictive control
HITACHI HIGH TECH CORP2 citations71
US11657059B2May 23, 2023
Search device, searching method, and plasma processing apparatus
HITACHI HIGH TECH CORP2 citations71
US12345522B2Jul 1, 2025
Computer system, dimension measurement method, and storage medium
HITACHI HIGH TECH CORP0 citations61
US11600536B2Mar 7, 2023
Dimension measurement apparatus, dimension measurement program, and semiconductor manufacturing system
HITACHI HIGH TECH CORP0 citations51
US11747774B2Sep 5, 2023
Search device, search program, and plasma processing apparatus
HITACHI HIGH TECH CORP0 citations50
US12320630B2Jun 3, 2025
Dimension measurement apparatus, semiconductor manufacturing apparatus, and semiconductor device manufacturing system
HITACHI HIGH TECH CORP0 citations47
HITACHI LTD
3 patentsUS11663713B2May 30, 2023
Image generation system
HITACHI LTD0 citations61
US10560762B2Feb 11, 2020
Sensing system, sensing method, and concentrator
HITACHI LTD0 citations51
US10483779B2Nov 19, 2019
Status determining method for secondary battery, status determining apparatus for secondary battery, secondary battery system, and charge/discharge control apparatus having status determining apparatus
HITACHI LTD0 citations38