Inventor
SOMEKH SASSON R
US11 patents
⚠️ This page may combine multiple inventors who share the name “SOMEKH SASSON R”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
9 patentsUS7159599B2Jan 9, 2007
Method and apparatus for processing a wafer
APPLIED MATERIALS INC96 citations97
US7048837B2May 23, 2006
End point detection for sputtering and resputtering
APPLIED MATERIALS INC68 citations97
US4911597AMar 27, 1990
Semiconductor processing system with robotic autoloader and load lock
APPLIED MATERIALS INC128 citations95
US5280983AJan 25, 1994
Semiconductor processing system with robotic autoloader and load lock
APPLIED MATERIALS INC108 citations94
US5224809AJul 6, 1993
Semiconductor processing system with robotic autoloader and load lock
APPLIED MATERIALS INC60 citations94
US5643366AJul 1, 1997
Wafer handling within a vacuum chamber using vacuum
APPLIED MATERIALS INC97 citations93
US7585686B2Sep 8, 2009
Method and apparatus for processing a wafer
APPLIED MATERIALS INC33 citations92
US6729944B2May 4, 2004
Chemical mechanical polishing apparatus with rotating belt
APPLIED MATERIALS INC24 citations92
US6900135B2May 31, 2005
Buffer station for wafer backside cleaning and inspection
APPLIED MATERIALS INC37 citations89