Inventor
WELDON MATTHEW
US8 patents
⚠️ This page may combine multiple inventors who share the name “WELDON MATTHEW”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
METROSOL INC
3 patentsUS7342235B1Mar 11, 2008
Contamination monitoring and control techniques for use with an optical metrology instrument
METROSOL INC32 citations91
US7663747B2Feb 16, 2010
Contamination monitoring and control techniques for use with an optical metrology instrument
METROSOL INC2 citations61
US7622310B2Nov 24, 2009
Contamination monitoring and control techniques for use with an optical metrology instrument
METROSOL INC2 citations61
SPEEDFAM IPEC CORP
3 patentsUS6960115B2Nov 1, 2005
Multiprobe detection system for chemical-mechanical planarization tool
SPEEDFAM IPEC CORP19 citations91
US6805613B1Oct 19, 2004
Multiprobe detection system for chemical-mechanical planarization tool
SPEEDFAM IPEC CORP17 citations91
US6447370B1Sep 10, 2002
Inline metrology device
SPEEDFAM IPEC CORP24 citations90