Inventor
HOLZAPFEL PAUL
US14 patents
⚠️ This page may combine multiple inventors who share the name “HOLZAPFEL PAUL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SPEEDFAM IPEC CORP
10 patentsUS6371838B1Apr 16, 2002
Polishing pad conditioning device with cutting elements
SPEEDFAM IPEC CORP107 citations98
US5961369AOct 5, 1999
Methods for the in-process detection of workpieces with a monochromatic light source
SPEEDFAM IPEC CORP61 citations95
US6347981B1Feb 19, 2002
Method and apparatus for conditioning polishing pads utilizing brazed diamond technology and titanium nitride
SPEEDFAM IPEC CORP17 citations92
US6347982B1Feb 19, 2002
Method for making a polishing apparatus utilizing brazed diamond technology and titanium nitride
SPEEDFAM IPEC CORP19 citations92
US5993289ANov 30, 1999
Methods for the in-process detection of workpieces in a CMP environment
SPEEDFAM IPEC CORP19 citations92
US6960115B2Nov 1, 2005
Multiprobe detection system for chemical-mechanical planarization tool
SPEEDFAM IPEC CORP19 citations91
US6805613B1Oct 19, 2004
Multiprobe detection system for chemical-mechanical planarization tool
SPEEDFAM IPEC CORP17 citations91
US6217410B1Apr 17, 2001
Apparatus for cleaning workpiece surfaces and monitoring probes during workpiece processing
SPEEDFAM IPEC CORP19 citations90
US5958148ASep 28, 1999
Method for cleaning workpiece surfaces and monitoring probes during workpiece processing
SPEEDFAM IPEC CORP42 citations90
US6350184B1Feb 26, 2002
Polishing pad conditioning device with cutting elements
SPEEDFAM IPEC CORP13 citations82
SPEEDFAM CORP
4 patentsUS5872633AFeb 16, 1999
Methods and apparatus for detecting removal of thin film layers during planarization
SPEEDFAM CORP390 citations98
US5733171AMar 31, 1998
Apparatus for the in-process detection of workpieces in a CMP environment
SPEEDFAM CORP71 citations95
US5823853AOct 20, 1998
Apparatus for the in-process detection of workpieces with a monochromatic light source
SPEEDFAM CORP36 citations92
US5842912ADec 1, 1998
Apparatus for conditioning polishing pads utilizing brazed diamond technology
SPEEDFAM CORP38 citations86