Inventor
MELONI MARK A
US11 patents
⚠️ This page may combine multiple inventors who share the name “MELONI MARK A”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
VERITY INSTR INC
6 patentsUS6991514B1Jan 31, 2006
Optical closed-loop control system for a CMP apparatus and method of manufacture thereof
VERITY INSTR INC174 citations95
US7339682B2Mar 4, 2008
Heterodyne reflectometer for film thickness monitoring and method for implementing
VERITY INSTR INC47 citations91
US7589843B2Sep 15, 2009
Self referencing heterodyne reflectometer and method for implementing
VERITY INSTR INC8 citations82
US10679832B2Jun 9, 2020
Microwave plasma source
VERITY INSTR INC3 citations72
US10923324B2Feb 16, 2021
Microwave plasma source
VERITY INSTR INC0 citations61
US10794763B2Oct 6, 2020
Fiberoptically-coupled measurement system with reduced sensitivity to angularly-driven variation of signals upon reflection from a wafer
VERITY INSTR INC0 citations50
SPEEDFAM IPEC CORP
5 patentsUS6685537B1Feb 3, 2004
Polishing pad window for a chemical mechanical polishing tool
SPEEDFAM IPEC CORP56 citations94
US6960115B2Nov 1, 2005
Multiprobe detection system for chemical-mechanical planarization tool
SPEEDFAM IPEC CORP19 citations91
US6805613B1Oct 19, 2004
Multiprobe detection system for chemical-mechanical planarization tool
SPEEDFAM IPEC CORP17 citations91
US6466642B1Oct 15, 2002
Methods and apparatus for the in-situ measurement of CMP process endpoint
SPEEDFAM IPEC CORP27 citations91
US6264532B1Jul 24, 2001
Ultrasonic methods and apparatus for the in-situ detection of workpiece loss
SPEEDFAM IPEC CORP45 citations91