Inventor
WILLIAMSON KELLY
US3 patents
Patents
3 patentsUS6455406B1Sep 24, 2002
Semiconductor processing method of forming a conductive connection through WxSiyNz material with specific contact opening etching
MICRON TECHNOLOGY INC10 citations63
US7125809B1Oct 24, 2006
Method and material for removing etch residue from high aspect ratio contact surfaces
MICRON TECHNOLOGY INC3 citations57
US6847085B2Jan 25, 2005
High aspect ratio contact surfaces having reduced contaminants
MICRON TECHNOLOGY INC2 citations57