Inventor
SHIMBORI HIROSHI
JP7 patents
⚠️ This page may combine multiple inventors who share the name “SHIMBORI HIROSHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO OHKA KOGYO CO LTD
4 patentsUS7318992B2Jan 15, 2008
Lift-off positive resist composition
TOKYO OHKA KOGYO CO LTD6 citations60
US7816072B2Oct 19, 2010
Positive resist composition and method for forming resist pattern
TOKYO OHKA KOGYO CO LTD2 citations59
US7172848B2Feb 6, 2007
Chemical amplification type positive resist composition
TOKYO OHKA KOGYO CO LTD1 citations48
US7422839B2Sep 9, 2008
Resin for positive resist composition, and positive resist composition using the same, laminate and method for forming resist pattern
TOKYO OHKA KOGYO CO LTD0 citations38