Inventor
OHSAKI YUMIKO
JP14 patents
⚠️ This page may combine multiple inventors who share the name “OHSAKI YUMIKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CANON KK
13 patentsUS7508493B2Mar 24, 2009
Exposure apparatus and device manufacturing method
CANON KK30 citations92
US7158144B2Jan 2, 2007
Image processing apparatus and method for converting data dependent on a first illuminating light into data dependent on a second illuminating light
CANON KK22 citations92
US6351304B1Feb 26, 2002
Multiple exposure method
CANON KK42 citations92
US7675629B2Mar 9, 2010
Exposure apparatus and device manufacturing method using a common path interferometer to form an interference pattern and a processor to calculate optical characteristics of projection optics using the interference pattern
CANON KK14 citations84
US6842255B2Jan 11, 2005
Interferometer and interferance measurement method
CANON KK17 citations84
US6586168B1Jul 1, 2003
Exposure method based on multiple exposure process
CANON KK13 citations83
US7538854B2May 26, 2009
Measuring apparatus and exposure apparatus having the same
CANON KK7 citations73
US6620556B2Sep 16, 2003
Mask for multiple exposure
CANON KK9 citations73
US7466395B2Dec 16, 2008
Exposure apparatus and device manufacturing method using the apparatus
CANON KK4 citations63
US6975385B2Dec 13, 2005
Projection optical system and exposure apparatus
CANON KK6 citations63
US7956987B2Jun 7, 2011
Measurement apparatus, exposure apparatus, and device manufacturing method
CANON KK5 citations62
US7688424B2Mar 30, 2010
Measurement apparatus, exposure apparatus, and device fabrication method
CANON KK1 citations52
US6709794B2Mar 23, 2004
Exposure method based on multiple exposure process
CANON KK1 citations51