Inventor
HOOGENBOOM THOMAS LEO MARIA
NL4 patents
Patents
4 patentsUS7710572B2May 4, 2010
Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method
ASML NETHERLANDS BV9 citations83
US7199863B2Apr 3, 2007
Method of imaging using lithographic projection apparatus
ASML NETHERLANDS BV10 citations76
US9971251B2May 15, 2018
Lithography system and a machine learning controller for such a lithography system
ASML NETHERLANDS BV2 citations71
US11099486B2Aug 24, 2021
Generating predicted data for control or monitoring of a production process
ASML NETHERLANDS BV3 citations70